Variance Analysis for Overlay Errors in Semiconductor Lithography Equipment

Advanced Lithography: Nanoimprint Lithography for Semiconductor and Interconnect Technologies

Lithography Simulation in Semiconductor Manufacturing

In the 30 years since lithography modeling was first introduced, optical lithography simulation has progressed from a curiosity, to a research and development tool, and finally to a manufacturing tool. While much has been published on new developments in lithography simulators and their use in advanced lithography development, less is published on how simulators have been used and are soon to b...

Nested analysis of variance with autocorrelated errors.

In this paper we consider the problem where there is a randomized experimental design with several successive time measurements on each experimental unit. One approach to the analysis of such data is to treat time as the subplot treatment and to use a split-plot analysis of variance. Alternatively, the problem may be considered in a more general multivariate framework. Here we recognize the tim...

Detecting, measuring and correcting errors in automated behavior analysis equipment

Behavioral phenotyping of transgenic and mutant mice depends on the observation and recording of behavior of specific strains of mice in a particular test apparatus in a particular laboratory [2]. Not all researchers, however, obtain the same results when the same strains of mice are tested in the same apparatus in different laboratories [11]. Chesler et al. [4] calculated that experimenter eff...

Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing

Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing Chia-Yu Hsu, Chen-Fu Chien* and Pei-Nong Chen Department of Information Management, Yuan Ze University, 135 Yuan-Tung Road, Chungli 32003, Taiwan, Republic of China; Department of Industrial Engineering and Engineering Management, National Tsing Hua University, 1...